JPH0438052U - - Google Patents
Info
- Publication number
- JPH0438052U JPH0438052U JP7966590U JP7966590U JPH0438052U JP H0438052 U JPH0438052 U JP H0438052U JP 7966590 U JP7966590 U JP 7966590U JP 7966590 U JP7966590 U JP 7966590U JP H0438052 U JPH0438052 U JP H0438052U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- storage container
- wafer storage
- pieces
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7966590U JPH0438052U (en]) | 1990-07-25 | 1990-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7966590U JPH0438052U (en]) | 1990-07-25 | 1990-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0438052U true JPH0438052U (en]) | 1992-03-31 |
Family
ID=31624027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7966590U Pending JPH0438052U (en]) | 1990-07-25 | 1990-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438052U (en]) |
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1990
- 1990-07-25 JP JP7966590U patent/JPH0438052U/ja active Pending